Campbell, S. A. (2001). The Science and engineering of microelectronic fabrication (2nd ed.). OUP.
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Chicago Style (17th ed.) Citation
Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. New York: OUP, 2001.
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MLA (9th ed.) Citation
Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. OUP, 2001.
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