APA (7th ed.) Citation
May, G. S., & Sze, S. M. (2004). Fundamentals of semiconductor fabrication. John Wiley.
Chicago Style (17th ed.) Citation
May, Gray S., and Simon M. Sze. Fundamentals of Semiconductor Fabrication. New Jersey: John Wiley, 2004.
MLA (9th ed.) Citation
May, Gray S., and Simon M. Sze. Fundamentals of Semiconductor Fabrication. John Wiley, 2004.
Warning: These citations may not always be 100% accurate.